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Volume 105
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Two-dimensional ultrasonic vibration-assisted grind-polishing of MFC valve surface with an innovative SPPU tool
Jun Cheng *, Zhaozhi Guo, Chuang Zhang, Jingyu Li, Kefeng Song
Received 13 June 2025, Revised 31 July 2025, Accepted 12 August 2025, Available online 18 August 2025, Version of Record 22 August 2025.
10.1016/j.partic.2025.08.005
Volume 105, October 2025, Pages 179-200
Received 13 June 2025, Revised 31 July 2025, Accepted 12 August 2025, Available online 18 August 2025, Version of Record 22 August 2025.
E-mail: author.jcheng@mail.neu.edu.cn
Highlights

• A novel grind-polishing tool was used to process seal surface of MFC,with a minimum roughness of 0.003 μm.

• Analyzed characteristics of the tool and established a surface roughness model.

• Analyzed influence of ultrasonic vibration amplitude on machining results.

• Illustrated machining stability and wear resistance of the tool.


Abstract

Ultra-precision machining technology received relatively little attention in the machining of key components for semiconductor equipment, such as the seal surfaces of mass flow controller (MFC). The machining quality of these features is vital to the corrosion resistance of MFC valve body. Currently, the processing of these features still relies on conventional manual polishing, which will lead to uncertainty in surface quality. Therefore, this article employs a special fabricated sinter pouring polyurethane (SPPU) grind-polishing tool to conduct two-dimensional ultrasonic vibration-assisted polishing experiments, with a focus on the tool's performance. The machining mechanism of the tool was analyzed. Taking into account the ultrasonic cavitation effect, the penetration depth of a single grain was calculated, and established a surface roughness model. Through experiments, it was found that as the amplitude increased, the surface roughness showed a decreasing trend, reaching as low as 0.003 μm, but the change in polishing force exhibited an opposite trend. Additionally, the material removal efficiency significantly improves with the increase of amplitude. The processed surface had a reduced carbon content and no oxygen element, indicating the stable machining performance of the tool. This article provides effective reference for the automated processing of MFC valve body features.

Graphical abstract
Keywords
Seal surface of MFC; SPPU tool; Ultrasonic vibration; Surface roughness; Polishing force
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